Neural network tuning of radio frequency plasma sources.

dc.contributor.author	Jones, Robert W.
dc.date.accessioned	2012-02-01T22:11:35Z
dc.date.available	2012-02-01T22:11:35Z
dc.date.created	2001	en_US
dc.date.issued	2012-02-01
dc.identifier.uri	http://hdl.handle.net/123456789/404
dc.description	[73]-81 p.	en_US
dc.language.iso	en_US	en_US
dc.relation.ispartofseries	Emporia State Research Studies;v. 42 no.4
dc.subject	Radio frequency.	en_US
dc.title	Neural network tuning of radio frequency plasma sources.	en_US
dc.type	Article	en_US
dc.college	las	en_US
dc.department	physical sciences	en_US